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Updated: Nov 23, 2025

Single Plane Illumination Module and Micro-capillary Approach for a Wide-field Microscope
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200×200 µm2 structured light source.

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    This summary is machine-generated.

    Integrable spatial-phase-modulating surface-emitting lasers (iPMSELs) enable compact 3D metrology light sources. These novel devices project arbitrary 2D beam patterns, including multi-dot and fringe patterns, without a zero-order beam for high-speed 3D inspections.

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    Area of Science:

    • Optoelectronics
    • Metrology
    • Optical Engineering

    Background:

    • 3D structured illumination is crucial for high-speed 3D metrology, utilizing multi-dot and fringe patterns.
    • Conventional light sources often involve bulky components like diffractive optical elements (DOEs) and projectors.
    • Vertical-cavity surface-emitting lasers (VCSELs) are used in combination with DOEs for pattern generation.

    Purpose of the Study:

    • To demonstrate the capability of integrable spatial-phase-modulating surface-emitting lasers (iPMSELs) as ultra-compact light sources for 3D metrology.
    • To examine the generation of multi-dot and fringe beam patterns without a zero-order beam using iPMSELs.
    • To assess the suitability of iPMSELs for 3D inspections in confined spaces.

    Main Methods:

    • Fabrication and characterization of needle-tip sized iPMSELs capable of generating static, arbitrary 2D beam patterns.
    • Demonstration of large-scale multi-dot pattern projection (over 10,000 points) from a 200×200-µm² emitter.
    • Successful shifting of fringe patterns, essential for phase-shifting profilometry, despite the presence of conjugate ±1st order beams.

    Main Results:

    • iPMSELs are significantly smaller (one order of magnitude) than DOEs and emit without a zero-order beam.
    • Projection of over 10,000 dots, enabling 1-megapixel images in wavenumber space, comparable to conventional projectors.
    • Electrical switching of beam patterns is demonstrated, highlighting the potential for dynamic control.
    • Fringe pattern shifting is achieved, crucial for phase-shifting profilometry applications.

    Conclusions:

    • iPMSELs offer a compact, efficient, and versatile alternative to conventional light sources in 3D metrology.
    • The demonstrated capabilities of iPMSELs are ideal for downsizing 3D metrology systems and enabling inspections in narrow spaces like dental and endoscopic procedures.
    • Further development of iPMSELs could lead to advancements in high-resolution, high-speed 3D measurement technologies.