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AlGaN/GaN on SiC Devices without a GaN Buffer Layer: Electrical and Noise Characteristics.
Justinas Jorudas1, Artūr Šimukovič1, Maksym Dub2,3
1Center for Physical Sciences and Technology (FTMC), Saulėtekio 3, 10257 Vilnius, Lithuania.
Micromachines
|January 9, 2021
Summary
This study showcases aluminum gallium nitride/gallium nitride (AlGaN/GaN) on silicon carbide (SiC) devices, demonstrating excellent high-voltage and radio frequency (RF) performance. The GaN-SiC hybrid material offers improved thermal stability for high-power applications.
Area of Science:
- Materials Science
- Semiconductor Physics
- Electrical Engineering
Background:
- Aluminum Gallium Nitride/Gallium Nitride (AlGaN/GaN) heterostructures are crucial for high-power and high-frequency electronics.
- Traditional GaN-based devices often suffer from thermal management issues and trapping effects.
- Developing novel substrate materials is key to overcoming these limitations.
Purpose of the Study:
- To investigate the high-voltage, noise, and radio frequency (RF) performance of AlGaN/GaN devices grown on silicon carbide (SiC) without a GaN buffer.
- To evaluate the potential of this GaN-SiC hybrid material for improved thermal stability and reduced trapping.
- To assess the suitability of these devices for high-frequency and high-power applications.
Main Methods:
- Fabrication of Schottky barrier diodes (SBDs) and transistors using AlGaN/GaN on SiC.
- Characterization of device performance including breakdown voltage, ideality factor, drain current, and transconductance.
- Hall measurements to determine electron density and mobility at various temperatures.
- Low-frequency noise measurements to assess trap density.
- Radio frequency (RF) analysis to determine cutoff frequencies (fT and fmax).
Main Results:
- SBDs exhibited breakdown voltages up to 780 V (0.8 MV/cm) with an ideality factor of approximately 1.7.
- Thermally stable two-dimensional electron gas (2DEG) density (1x10^13 cm^-2) and high mobility (1.7x10^3 cm^2/V.s at 300K, 1.0x10^4 cm^2/V.s at 77K) were observed.
- Transistors achieved a maximum drain current of 0.5 A/mm and transconductance of 150 mS/mm (L=5 μm).
- Effective trap density was found to be below 10^19 cm^-3 eV^-1.
- RF analysis showed fT up to 1.3 GHz and fmax up to 6.7 GHz, with figures of merit (fT × L) reaching 6.7 GHz·μm.
Conclusions:
- The AlGaN/GaN on SiC hybrid material demonstrates excellent high-voltage and RF performance.
- The absence of a GaN buffer improves thermal management and reduces trapping effects.
- These devices show significant potential for advanced high-frequency and high-power electronic applications requiring enhanced thermal stability.
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