Using Palladium Nanocubes on ZnO Nanostructures in Hydrogen Gas Sensor for Fast Response and Recovery Time

We developed a novel sensor structure by synthesizing Pd nanocubes (NCs) decorated on ZnO nanostructures (NSs) applied to resistive-type H₂ gas sensor with micro-length in sensing channel. The ZnO NSs were selectively grown between micro-size finger-like interdigital electrodes through microelectromechanical technology. The novel H₂ sensor structure with the sensing channel was reduced to micro-size by this proposed method to obtain a sensor with fast response/recovery time. The as-prepared structure exhibited robust sensing performance with a response of 11% at optimal temperature of 150 °C, good linearity, and fast response/recovery time within 10 s. The speed of chemisorption through the diffusion pathway in Pd NCs combined with micro-length in sensing channel in sensor showed fast response and recovery times of 9 and 15 s, respectively, toward 10,000 ppm (1%) H₂ at 150 °C. The result showed approximate linearity response in H₂ concentration range of 5÷10,000 ppm and a large operating temperature range from room temperature to 200 °C.