Preparation and Performance Analysis of Ag/ZnO Humidity Sensor

Highly sensitive silver (Ag) modified zinc oxide (ZnO) humidity sensors were prepared by hydrothermal synthesis and the mechanism was studied. Experimental results show that Ag-modified ZnO can effectively enhance the performance of a humidity sensor. Large number of oxygen vacancies and many active sites are generated on the surface when molar ratio of Ag⁺ to Zn²⁺ is 1:100, which can accelerate the decomposition of water molecules on surface of the material, thereby improving the response of humidity sensor. Moreover, the linearity of ZnO humidity sensor is greatly improved by silver nanoparticles. Compared with previously reported ZnO-based humidity sensors, Ag/ZnO humidity sensors have a better response (151,700%), good linearity, low hysteresis (3%), and short response/recovery time (36/6 s). At the same time, it is found that the light had little effect on the performance of Ag/ZnO. Therefore, this kind of ZnO sensor with stable performance and excellent performance is expected to be used in the detection of relative humidity in conventional environments.