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Updated: Nov 18, 2025

Single-Digit Nanometer Electron-Beam Lithography with an Aberration-Corrected Scanning Transmission Electron Microscope
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Automated geometric aberration correction for large-angle illumination STEM.

Ryo Ishikawa1, Riku Tanaka2, Shigeyuki Morishita3

  • 1Institute of Engineering Innovation, University of Tokyo, Bunkyo, Tokyo, 113-8656, Japan; PRESTO, Japan Science and Technology Agency, Kawaguchi, Saitama 332-0012, Japan.

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|February 6, 2021
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Summary

This study introduces a faster, automated method for aberration correction in scanning transmission electron microscopy (STEM) using live atomic-resolution images. This advancement improves depth resolution and enables new imaging techniques.

Keywords:
Annular dark-field (ADF)Differential phase-contrast (DPC)depth sectioninggeometric aberration correctionscanning transmission electron microscopy (STEM)

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Area of Science:

  • Materials Science
  • Physics
  • Microscopy

Background:

  • Scanning transmission electron microscopy (STEM) depth resolution is limited by illumination angle.
  • Recent aberration correction has increased illumination angles significantly.
  • Minimizing lower-order aberrations is crucial for 3D depth sectioning with large angles.

Purpose of the Study:

  • To demonstrate a live aberration correction method for STEM.
  • To improve the speed and automation of aberration correction.
  • To enhance depth resolution and enable advanced imaging modes.

Main Methods:

  • Developed a live aberration correction technique using atomic-resolution STEM images.
  • Utilized images directly for correction, bypassing traditional Ronchigram analysis.
  • Focused on minimizing 2- and 3-fold astigmatisms and axial coma.

Main Results:

  • Achieved faster aberration correction compared to conventional methods.
  • Demonstrated the potential for a fully automated aberration correction program.
  • Validated the method's effectiveness for axial depth sectioning and phase imaging.

Conclusions:

  • The new live aberration correction method enhances STEM capabilities.
  • This technique is vital for achieving high-resolution 3D imaging and phase contrast.
  • The method offers significant time savings and automation potential for STEM users.