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Comparative study on the specimen thickness measurement using EELS and CBED methods.

Yoon-Uk Heo1

  • 1Graduate Institute of Ferrous Technology, Pohang University of Science and Technology, Cheongam-Ro 77, Hyoja dong, Pohang, 37-673, Republic of Korea. yunuk01@postech.ac.kr.

Applied Microscopy
|February 13, 2021
PubMed
Summary
This summary is machine-generated.

Electron energy loss spectroscopy (EELS) and convergent beam electron diffraction (CBED) accurately measured thin foil thickness in an Fe-Mn-C alloy. Both methods showed excellent agreement for precise thickness determination.

Keywords:
CBEDCarbon contamination methodEELSTEMThickness measurement

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Area of Science:

  • Materials Science
  • Analytical Chemistry
  • Physics

Background:

  • Accurate thickness measurement is crucial for materials characterization.
  • Electron microscopy techniques offer high spatial resolution for nanoscale analysis.
  • Comparing different methods validates their reliability and applicability.

Purpose of the Study:

  • To compare the accuracy of electron energy loss spectroscopy (EELS) and convergent beam electron diffraction (CBED) for thickness measurements.
  • To evaluate the performance of these techniques in an Fe-18Mn-0.7C alloy.
  • To establish the coherency between EELS and CBED for thin foil thickness determination.

Main Methods:

  • Specimen preparation and tilting to achieve the two-beam condition in transmission electron microscopy (TEM).
  • Acquisition of low-loss EELS spectra and CBED patterns using scanning TEM (STEM) and TEM-CBED modes.
  • Application of the log-ratio method for EELS thickness measurement and analysis of Kossel-Möllenstedt (K-M) fringes for CBED thickness evaluation.

Main Results:

  • Both EELS and CBED methods were successfully employed for thickness measurements in the Fe-18Mn-0.7C alloy.
  • A high degree of coherency was observed between the thickness values obtained from EELS and CBED.
  • The difference between the two methods was less than 5% within the measured thickness range of 72–113 nm.

Conclusions:

  • EELS and CBED are reliable and consistent methods for determining the thickness of thin foils in advanced alloys.
  • The findings support the use of either technique for precise thickness analysis in materials research.
  • The study validates the accuracy of these electron microscopy-based methods for quantitative analysis.