Solid-State Dewetting of Gold on Stochastically Periodic SiO₂ Nanocolumns Prepared by Oblique Angle Deposition

Solid-state dewetting (SSD) on patterned substrates is a straightforward method for fabricating ordered arrays of metallic nanoparticles on surfaces. However, a drawback of this procedure is that the patterning of substrates usually requires time-consuming and expensive two-dimensional (2D) fabrication methods. Nanostructured thin films deposited by oblique angle deposition (OAD) present at the surface a form of stochastically arranged periodic bundles of nanocolumns that might act as a patterned template for fabricating arrays of nanoparticles by SSD. In this work, we explore this concept and investigate the effect of three different types of OAD SiO₂ thin films on the SSD of Au deposited on their surface. We demonstrate that the size and spatial distribution of the particles can be tailored through the surface morphology of these OAD film substrates. It has been found that the SSD of the evaporated Au layer gives rise to a bimodal size distribution of particles. A majority of them appeared as mesoparticles with sizes ≳100 nm and the rest as nanoparticles with ∼10 nm, respectively, located either on top of the nanocolumns following their lateral distribution (i.e., resulting from a patterning effect) or incorporated inside the open mesopores existing among them. Moreover, on the SiO₂-OAD thin films where interconnected nanocolumnar bundles arrange in the form of discrete motifs, the patterning effect gave rise to the formation of approximately one Au mesoparticle per motif, which is one of the assets of patterned SSD. The morphological, optical (i.e., plasmon resonance), and crystalline structural characteristics of Au mesoparticles suggest that the interplay between a discontinuous nanocolumnar surface acting as a template and the poor adhesion of Au onto SiO₂ are key factors for the observed template effect controlling the SSD on the surface of OAD thin films.