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On Stochastic Reduction in Laser-Assisted Dielectric Breakdown for Programmable Nanopore Fabrication
Zifan Tang1, Ming Dong1, Xiaodong He1
1Department of Electrical Engineering, Pennsylvania State University, University Park, Pennsylvania 16802, United States.
ACS Applied Materials & Interfaces
|March 11, 2021
Summary
A new physical model estimates single nanopore formation probability during laser-assisted dielectric breakdown. High laser power and low electric fields favor single nanopore fabrication for accessible solid-state nanopore applications.
Area of Science:
- Materials Science
- Nanotechnology
- Physics
Background:
- Controlled dielectric breakdown offers a path to accessible solid-state nanopore fabrication.
- Laser-assisted dielectric breakdown aids in controlling nanopore location and minimizing multiple pore formation.
Purpose of the Study:
- To develop a physical model for estimating single nanopore formation probability.
- To identify optimal laser power and electric field combinations for controlled nanopore fabrication.
Main Methods:
- Developed a physical model incorporating Weibull statistical parameters and laser-induced photothermal etching rates.
- Estimated single nanopore formation probability under varying laser power and electric field conditions.
- Validated model predictions with experimental data.
Main Results:
- The model successfully estimates nanopore formation probability.
- Experimental data align with model predictions.
- A combination of high laser power and low electric field statistically favors single nanopore formation at a specific location.
Conclusions:
- The developed physical model provides experimental insights for nanopore fabrication via laser-assisted dielectric breakdown.
- This method can enhance accessibility to solid-state nanopores and their sensing applications.

