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Updated: Nov 14, 2025

Quantitative Atomic-Site Analysis of Functional Dopants/Point Defects in Crystalline Materials by Electron-Channeling-Enhanced Microanalysis
Published on: May 10, 2021
Akshay Agarwal1, John Simonaitis1, Karl K Berggren1
1Department of Electrical Engineering and Computer Science, Massachusetts Institute of Technology, United States of America.
This study introduces a new method for measuring the Detective Quantum Efficiency (DQE) in scanning electron microscopy by directly counting secondary electrons, improving accuracy for nanoscale imaging. This technique avoids assumptions about electron distribution, enabling precise DQE measurements across various conditions.
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