In-line characterization of nanostructures produced by roll-to-roll nanoimprinting

Area of Science:

• Nanotechnology
• Metrology
• Optical Engineering

Background:

• Roll-to-roll (R2R) imprinting is a scalable nanotechnology manufacturing technique.
• In-line metrology is crucial for real-time quality control in R2R processes.
• Characterizing nanostructures with high precision at production speeds remains a challenge.

Purpose of the Study:

• To present an in-line metrology solution for dimensional characterization of R2R imprinted nanostructures.
• To demonstrate the system's capability for accurate nanoscale measurements.
• To integrate scatterometric analysis with hyperspectral imaging for enhanced metrology.

Main Methods:

• Development of an in-line metrology system utilizing scatterometric analysis.
• Deployment of a hyperspectral camera for optical data acquisition during R2R imprinting (10 m/min).
• Combination of real-space imaging ease-of-use with spectral scatterometry information.

Main Results:

• Accurate nanoscale dimensional measurements of 1D line gratings (various periods and orientations).
• Precise characterization of nanostructure depths with uncertainties in the few-nanometer range.
• Demonstration of hyperspectral imaging's utility in mitigating vibrational effects.

Conclusions:

• The developed in-line metrology solution enables effective dimensional characterization of R2R imprinted nanostructures.
• The system provides high accuracy and can operate at industrial production speeds.
• Hyperspectral scatterometry offers a robust approach for real-time quality control in nanomanufacturing.