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Design and Characterization Methodology for Efficient Wide Range Tunable MEMS Filters
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A Low-g MEMS Accelerometer with High Sensitivity, Low Nonlinearity and Large Dynamic Range Based on Mode-Localization

Muhammad Mubasher Saleem1,2, Shayaan Saghir1, Syed Ali Raza Bukhari1

  • 1Department of Mechatronics Engineering, National University of Sciences and Technology, Islamabad 44000, Pakistan.

Micromachines
|April 3, 2021
PubMed

Keywords:
MEMS accelerometerSOIMUMPsdynamic rangefinite-element-methodmode-aliasingmode-localizationnonlinearityresolutionsensitivity tuningweakly coupled resonators

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