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Related Experiment Video

Updated: Nov 10, 2025

Characterization of SiN Integrated Optical Phased Arrays on a Wafer-Scale Test Station
05:57

Characterization of SiN Integrated Optical Phased Arrays on a Wafer-Scale Test Station

Published on: April 1, 2020

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Silicon nitride assisted 1×64 optical phased array based on a SOI platform.

Qing Wang, Shuxiao Wang, Lianxi Jia

    Optics Express
    |April 6, 2021
    PubMed
    Summary
    This summary is machine-generated.

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    Researchers developed a 1x64 optical phased array (OPA) using silicon nitride and silicon waveguides. This integrated photonic device achieves a wide field of view with a small spot size for advanced optical applications.

    Area of Science:

    • Photonics and Optical Engineering
    • Integrated Optics
    • Semiconductor Devices

    Background:

    • Optical phased arrays (OPAs) are crucial for beam steering and optical manipulation.
    • Silicon-on-insulator (SOI) platforms offer advantages for integrated photonics.
    • Combining silicon nitride and silicon in integrated devices allows for tailored optical properties.

    Purpose of the Study:

    • To demonstrate a novel 1x64 optical phased array (OPA) on a silicon-on-insulator (SOI) platform.
    • To leverage the benefits of both silicon nitride and silicon waveguides for enhanced performance.
    • To characterize the field of view and spot size of the developed OPA.

    Main Methods:

    • Fabrication of an OPA using a hybrid silicon nitride and silicon-on-insulator (SOI) platform.

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  • Utilizing silicon nitride waveguides for the input port to manage optical power.
  • Employing silicon waveguides with heaters as phase shifters due to silicon's high thermo-optic coefficient.
  • Integrating a double-layer silicon nitride assisted grating in the emitter to optimize emission strength and reduce spot size.

    • Main Results:

    • Successful demonstration of a 1x64 OPA.
    • Achieved a measured field of view of 35.5°×22.7°.
    • Obtained a precise spot size of 0.69°×0.075°.
    • The grating emitter length was 1.5 mm.

    Conclusions:

    • The hybrid SOI platform with silicon nitride and silicon waveguides is effective for OPA fabrication.
    • The design enables efficient optical power handling and precise beam control.
    • The demonstrated OPA achieves a significant field of view with a minimized spot size, suitable for advanced optical systems.