Nanofabrication Techniques: Challenges and Future Prospects.

Usama Tahir1, Young Bo Shim2, Muhammad Ahmad Kamran1

  • 1Department of Cogno-Mechatronics Engineering, Pusan National University, Busan 46241, South Korea.

Summary

Large-scale micro/nano-fabrication enables advanced electronic, photonic, and biological devices. This review highlights techniques for creating 3D micro/nano-features, discussing applications and future directions.

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