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Gas Damping in Capacitive MEMS Transducers in the Free Molecular Flow Regime

Boris A Boom1, Alessandro Bertolini1, Eric Hennes1

  • 1National Institute for Subatomic Physics, Science Park 105, 1098 XG Amsterdam, The Netherlands.

Sensors (Basel, Switzerland)
|April 30, 2021
PubMed

Keywords:
Monte Carlo methodsQ measurementcapacitance transducersfree molecular flowgas damping

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