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Blue Electroluminescence in SRO-HFCVD Films
Haydee P Martínez1, José A Luna2, Roberto Morales1
1Departamento de Ingeniería Eléctrica y Electrónica, Tecnológico Nacional de México/Instituto Tecnológico de Apizaco Carretera Apizaco-Tzompantepec, Esquina con Av. Instituto Tecnológico S/N. Conurbado Apizaco-Tzompantepec, Apizaco 90300, Mexico.
This study investigates electroluminescence in silicon-rich oxide (SRO) films within Metal-Insulator-Semiconductor (MIS) and Metal-Insulator-Metal (MIM) structures. Researchers observed distinct conduction mechanisms and blue light emission under varying electrical conditions.
Area of Science:
- Materials Science
- Solid State Physics
- Optoelectronics
Background:
- Electroluminescence in semiconductor structures is crucial for optoelectronic devices.
- Silicon-rich oxide (SRO) films offer unique electronic and optical properties.
- Understanding charge transport mechanisms is key to optimizing device performance.
Purpose of the Study:
- To investigate electroluminescence in Metal-Insulator-Semiconductor (MIS) and Metal-Insulator-Metal (MIM) structures incorporating single- and double-layer silicon-rich oxide (SRO) films.
- To analyze the electrical characteristics and conduction mechanisms within these SRO-based structures.
- To correlate conduction mechanisms with observed electroluminescence spectra and emission patterns.
Main Methods:
- Fabrication of MIS and MIM structures using Hot Filament Chemical Vapor Deposition (HFCVD) for SRO films.
- Characterization of SRO films including thickness, refractive indices, and excess silicon content.
- Electrical and electroluminescence measurements of the fabricated structures, including current-voltage (I-V) analysis.
Main Results:
- SRO films were characterized, and their properties were analyzed.
- MIS and MIM structures exhibited distinct current-voltage (I-V) behaviors, showing high and low conduction states.
- Multiple conduction mechanisms (Ohmic, Poole-Frenkel, Fowler-Nordheim, Hopping) were identified in the SRO films.
- Electroluminescence was observed, initially as bright dots at low currents (-20 V to -50 V) and later as uniform blue light emission at higher currents (-67 V).
Conclusions:
- The study successfully fabricated and characterized SRO-based MIS and MIM structures.
- Conduction mechanisms in SRO films significantly influence electroluminescence properties.
- Tunable electroluminescence, from discrete dots to uniform blue emission, was achieved by varying applied voltage and current.
