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Integrated, Speckle-Based Displacement Measurement for Lateral Scanning White Light Interferometry.

Gert Behrends1, Dirk Stöbener1,2, Andreas Fischer1,2

  • 1Bremen Institute for Metrology, Automation and Quality Science, University of Bremen, 28359 Bremen, Germany.

Sensors (Basel, Switzerland)
|April 30, 2021
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Summary
This summary is machine-generated.

Accurate lateral displacement measurement is crucial for high-resolution topography using lateral scanning white light interferometry (LSWLI). Digital speckle correlation (DSC) integrated into LSWLI significantly improves measurement accuracy for moving surfaces.

Keywords:
digital speckle correlationdisplacement measurementsurface topographywhite light interferometry

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Area of Science:

  • Metrology
  • Optical Measurement Techniques
  • Surface Science

Background:

  • Lateral scanning white light interferometry (LSWLI) enables high-resolution topography measurements on dynamic surfaces.
  • Precise lateral displacement data is critical for achieving the resolution capabilities of LSWLI.
  • The impact of displacement uncertainty on topography measurement accuracy remains an open question.

Purpose of the Study:

  • To quantify the influence of displacement uncertainty on LSWLI topography measurements.
  • To propose and validate an integrated digital speckle correlation (DSC) method for precise displacement measurement within LSWLI.
  • To assess the benefits of integrated DSC for LSWLI on moving objects.

Main Methods:

  • Monte Carlo simulations were performed to analyze the effect of displacement uncertainty on LSWLI.
  • Digital speckle correlation (DSC) was integrated into the LSWLI field of view for simultaneous displacement measurement.
  • An experimental LSWLI setup with integrated DSC was tested on a rotating cylindrical object with a linear encoder strip surface.

Main Results:

  • Monte Carlo simulations revealed that displacement uncertainty significantly impacts total height uncertainty more than motion uncertainty.
  • Integrated DSC provided precise, synchronized, and calibrated displacement measurements without external systems.
  • The integrated LSWLI-DSC system successfully performed topography measurements on a rotating surface.

Conclusions:

  • Displacement measurement accuracy is a critical factor in LSWLI performance.
  • Integrating DSC into LSWLI offers a robust solution for accurate topography measurements on moving surfaces.
  • The proposed method eliminates the need for external synchronization and calibration, enhancing applicability for translatory and rotatory scans.