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Gert Behrends1, Dirk Stöbener1,2, Andreas Fischer1,2
1Bremen Institute for Metrology, Automation and Quality Science, University of Bremen, 28359 Bremen, Germany.
Accurate lateral displacement measurement is crucial for high-resolution topography using lateral scanning white light interferometry (LSWLI). Digital speckle correlation (DSC) integrated into LSWLI significantly improves measurement accuracy for moving surfaces.
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