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Photothermal Optical Beam Steering Using Large Deformation Multi-Layer Thin Film Structures
Harris J Hall1, Sean McDaniel1, Piyush Shah2
1Air Force Research Laboratory, Sensors Directorate, Wright-Patterson AFB, OH 45433, USA.
Micromachines
|April 30, 2021
Summary
Photothermal actuation of microstructures can steer light beams. Asymmetric designs offer greater tilt control but show some drift, suggesting potential for optical beam manipulation in microsystems.
Area of Science:
- Microsystems Engineering
- Optics
- Materials Science
Background:
- Photothermal actuation is crucial for remote, on-chip manipulation in microsystems.
- Thin-film microstructures offer potential for light beam steering and shaping.
Purpose of the Study:
- To investigate photothermal actuation of large-deformation microstructures for light beam control.
- To characterize the photothermal tilt response of symmetric and asymmetric absorptive structures.
Main Methods:
- Simulations and experiments were used to explore thin-film microstructures.
- Infrared laser exposures at varying power levels were applied to test structures.
- Photothermal tilt response was measured for different designs and beam placements.
Main Results:
- Uniformly symmetric structures showed small mechanical tilts (<4°) with central infrared beam placement.
- Asymmetric absorptive designs demonstrated greater responsivity (up to ~9° tilt) and directional control.
- The asymmetric design exhibited significant mechanical tilt burn-in and drift (5-10°).
Conclusions:
- Photothermal actuation of microstructures can achieve rudimentary optical beam control.
- Asymmetric designs show promise for enhanced photoactuation but require further investigation into stability.
- These findings suggest potential for developing advanced optical beam steering applications.

