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Related Concept Videos

Pressure Gauges01:20

Pressure Gauges

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Most pressure gauges, like those on scuba tanks, are calibrated to read zero at atmospheric pressure. Readings from such gauges are called the gauge pressure, which is the pressure relative to atmospheric pressure. When the pressure inside the tank exceeds atmospheric pressure, the gauge reports a positive value. Some gauges are designed to measure negative pressure. For example, many physics experiments must take place in a vacuum chamber, a rigid chamber from which some of the air is pumped...
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Multi-layer graphene pirani pressure sensors.

Joost Romijn1, Robin J Dolleman2, Manvika Singh1

  • 1Laboratory of Electronic Components, Technology and Materials (ECTM), Department of Microelectronics, Delft University of Technology, The Netherlands.

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|May 10, 2021
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Summary

Researchers developed a novel graphene Pirani pressure sensor. This miniaturized sensor offers high performance, low power consumption, and potential for selective gas sensing and chip-level integration.

Keywords:
Pirani pressure sensorgraphenemicroelectromechanical systems (MEMS)microsensorspressure sensorssensor miniaturization

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Area of Science:

  • Materials Science
  • Nanotechnology
  • Sensor Technology

Background:

  • Pirani pressure sensors rely on the pressure-dependent electrical conductivity of a heated filament.
  • Miniaturization and advanced materials are crucial for enhancing sensor performance and reducing power consumption.
  • Nanomaterials offer unique properties suitable for advanced sensor applications.

Purpose of the Study:

  • To demonstrate a multi-layer suspended graphene strip as a Pirani pressure sensor.
  • To evaluate its performance, including responsivity, power consumption, and pressure dependence.
  • To explore its potential for miniaturization, selective gas sensing, and chip-level integration.

Main Methods:

  • Fabrication of a multi-layer suspended graphene strip.
  • Characterization of its electrical resistance dependence on gas pressure.
  • Comparison of experimental results with existing Pirani sensor models.

Main Results:

  • Observed clear pressure dependence of graphene strip's electrical resistance (2.75% change from 1 to 1000 mbar).
  • Achieved low power consumption (8.5 mW) and 100x miniaturization compared to state-of-the-art.
  • Demonstrated gas-dependent sensor response and operation near atmospheric pressure.

Conclusions:

  • Suspended graphene strips are effective for Pirani pressure sensing, offering significant miniaturization and low power consumption.
  • The sensor's characteristics are suitable for applications like barometers and selective gas detection.
  • Graphene's compatibility with wafer-scale fabrication paves the way for integrated microelectronic systems.