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3D reconstruction of the specular surface using an iterative stereoscopic deflectometry method.
Optics Express
|May 14, 2021
Summary
This study introduces an iterative algorithm for stereoscopic phase measuring deflectometry, enabling faster 3D reconstruction of specular surfaces without pixel searching. The method accurately determines surface height for improved optical metrology.
Area of Science:
- Optical Metrology
- Computer Vision
- Surface Reconstruction
Background:
- Phase measuring deflectometry (PMD) is a key technique for 3D measurement of specular surfaces.
- Existing methods face challenges like monoscopic ambiguity and time-consuming pixel searching in stereoscopic PMD.
- Efficient and accurate reconstruction of specular surfaces remains a significant challenge in optical metrology.
Purpose of the Study:
- To develop an iterative reconstruction algorithm for stereoscopic phase measuring deflectometry systems.
- To eliminate the need for time-consuming pixel searching during specular surface reconstruction.
- To improve the accuracy and efficiency of 3D specular surface measurement.
Main Methods:
- An iterative reconstruction algorithm is proposed for stereoscopic phase measuring deflectometry.
- A coarse-to-fine optimization method is used to obtain an initial seed point on the specular surface.
- The algorithm utilizes a pinhole model for iterative surface form updates, starting from an initial plane approximation.
Main Results:
- The proposed iterative algorithm successfully reconstructs specular surfaces without pixel searching.
- Simulations and experimental results demonstrate the feasibility and efficiency of the method.
- The algorithm shows comprehensive accuracy and robustness in specular surface measurement.
Conclusions:
- The developed iterative reconstruction algorithm significantly enhances stereoscopic phase measuring deflectometry.
- This method offers a faster and more accurate approach to 3D specular surface reconstruction.
- The technique provides a robust solution for challenging optical metrology applications.

