Reflection-type vapor cell for micro atomic clocks using local anodic bonding of 45° mirrors

This Letter reports the design, fabrication, and evaluation of reflection-type planar vapor cells for chip-scale atomic clocks. The cell with 2-8 mm cavity length contains two 45° Bragg reflector mirrors assembled using a local anodic bonding. Coherent population trapping resonance of Rb atoms is observed, realizing an atomic clock operation. Allan deviations at an averaging time of 1 s are ${2.2} \times {{1}}{{{0}}^{- 10}}$ and ${9.5} \times {{1}}{{{0}}^{- 11}}$ for 2 mm long and 6 mm long vapor cells, respectively. These results show that planar vapor cells compatible with a system-in-package are feasible without degradation of clock stabilities compared to conventional vertically stacked cells.