Related Experiment Video
Updated: Nov 4, 2025

Quantitative Atomic-Site Analysis of Functional Dopants/Point Defects in Crystalline Materials by Electron-Channeling-Enhanced Microanalysis
Published on: May 10, 2021
Quantitative Atomic-Site Analysis of Functional Dopants/Point Defects in Crystalline Materials by
Masahiro Ohtsuka1, Shunsuke Muto2
1Electron Nanoscopy Division, Advanced Measurement Technology Center, Institute of Materials & Systems for Sustainability, Nagoya University.
A new electron-channeling analysis method precisely determines elemental and chemical information in crystalline materials. This technique offers a powerful alternative for site occupancy analysis, especially for nanomaterials.
Area of Science:
- Materials Science
- Analytical Chemistry
- Nanotechnology
Background:
- Conventional elemental and chemical analysis methods face limitations with small sample sizes and elements with similar scattering factors.
- Accurate determination of site occupancy and site-specific chemical information is crucial for advanced materials development.
Purpose of the Study:
- To introduce a novel elemental and chemical analysis scheme utilizing electron-channeling phenomena.
- To demonstrate the capability of quantitatively deriving site occupancies and site-dependent chemical information.
- To present a methodological article detailing the experimental procedure and analysis of beam-rocking microanalysis.
Main Methods:
- Utilizing electron-channeling phenomena in crystalline materials with a rocking incident high-energy electron beam.
- Employing energy-dispersive X-ray spectroscopy (EDS) and electron energy-loss spectroscopy (EELS) on a scanning transmission electron microscope (STEM).
- Fixing a sub-micrometric pivot point on the specimen for precise beam control.
Main Results:
- Quantitative derivation of site occupancies for impurities or doped elements.
- Acquisition of site-dependent chemical information within crystalline specimens.
- Demonstration of applicability to element combinations challenging for conventional methods like Rietveld analysis.
Conclusions:
- The novel beam-rocking microanalysis scheme provides a robust method for elemental and chemical analysis in materials science.
- This technique overcomes limitations of traditional methods, particularly for nanotechnologies and complex material compositions.
- The study establishes a foundation for applying this advanced microanalysis technique in diverse research areas.
More Related Videos
11:33All-electronic Nanosecond-resolved Scanning Tunneling Microscopy: Facilitating the Investigation of Single Dopant Charge Dynamics
Published on: January 19, 2018
11:14Comprehensive Characterization of Extended Defects in Semiconductor Materials by a Scanning Electron Microscope
Published on: May 28, 2016