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Related Experiment Video

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Automating ALCHEMI at the nano-scale using software compatible with PC-controlled transmission electron microscopy.

Akimitsu Ishizuka1,2, Masahiro Ohtsuka1,3, Shunsuke Muto1,3

  • 1Department of Materials Physics, Graduate School of Engineering, Nagoya University, Chikusa-ku, Nagoya, 464-8603, Japan.

Journal of Applied Crystallography
|June 20, 2022
PubMed
Summary
This summary is machine-generated.

A new method enables atom location by channeling-enhanced microanalysis (ALCHEMI) on nanoscale areas as small as 30 nm. This advancement overcomes hardware limitations, allowing for more precise elemental analysis in smaller regions of crystalline samples.

Keywords:
automated probe shift correctionelectron channelingelectron energy-loss spectroscopyenergy-dispersive X-ray spectroscopynano-scale analysissite-selective microanalysis

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Area of Science:

  • Materials Science
  • Analytical Chemistry
  • Electron Microscopy

Background:

  • Atom location by channeling-enhanced microanalysis (ALCHEMI) provides atom-site-specific elemental information in crystalline samples.
  • High-angular-resolution electron-channeled X-ray/electron spectroscopy (HARECXS/HARECES) is a quantitative extension of ALCHEMI.
  • Current automated methods are limited to analyzing regions of 1 µm or larger.

Purpose of the Study:

  • To overcome the minimum analysis area limitation of current ALCHEMI techniques.
  • To enable ALCHEMI and its derivative methods on nanoscale regions without hardware modification.
  • To develop a more sophisticated and automated scheme for high-resolution elemental analysis.

Main Methods:

  • Modification of the quantitative electron diffraction (QED) software plug-in within the Gatan Microscopy Suite.
  • Development of a new scheme for QED to perform ALCHEMI using energy-dispersive X-ray spectroscopy (EDX) and/or electron energy-loss spectroscopy (EELS).
  • Calibration and control of the electron probe for precise positioning during beam tilting.

Main Results:

  • The modified QED enables automated ALCHEMI on areas as small as 30 nm.
  • The new scheme allows for concurrent EDX and EELS analysis.
  • The method is compatible with any PC-controlled commercial microscope without hardware changes.

Conclusions:

  • The developed QED-based ALCHEMI method significantly reduces the minimum analysis area.
  • This technique provides unprecedented nanoscale elemental site-specific analysis capabilities.
  • The approach democratizes advanced analytical techniques for smaller sample areas.