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Miniature Optical Particle Counter and Analyzer Involving a Fluidic-Optronic CMOS Chip Coupled with a

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  • 1CEA-LETI Minatec, Université Grenoble-Alpes, F-38000 Grenoble, France.

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Summary

We developed a novel miniaturized optical particle measurement (PM) sensor. This sensor uses a hybrid fluidic-optronic CMOS sensor and advanced optics to accurately detect and characterize particles.

Keywords:
CMOS image sensorair qualitylight-scatteringmicro-fabricationminiature opticsparticulate matter sensor

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Area of Science:

  • Optoelectronics
  • Microfluidics
  • Particle characterization

Background:

  • Miniaturized optical sensors are crucial for real-time particle analysis.
  • Existing sensors face challenges in sensitivity and image processing complexity.
  • Integration of fluidics and optics is key for advanced sensing.

Purpose of the Study:

  • To present advances in miniaturized optical particle measurement (PM) sensors.
  • To introduce a novel hybrid fluidic-optronic CMOS sensor design.
  • To demonstrate enhanced particle characterization capabilities.

Main Methods:

  • Development of a hybrid fluidic-optronic CMOS (holed retina) sensor.
  • Integration with a millimeter-sized, refracto-reflective optical system.
  • Design, fabrication, and characterization using polystyrene beads.

Main Results:

  • The sensor records particle scattering signatures with improved sensitivity.
  • Optical pre-processing simplifies image analysis and broadens the field of view.
  • Successful characterization of calibrated polystyrene beads was achieved.

Conclusions:

  • The developed sensor offers enhanced particle characterization capabilities.
  • The hybrid fluidic-optronic design shows potential for further miniaturization.
  • This technology can be integrated into various particle analysis applications.