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Updated: Nov 3, 2025

Fabrication of Uniform Nanoscale Cavities via Silicon Direct Wafer Bonding
Published on: January 9, 2014
Xiaohui Song1,2, Shunli Wu2, Rui Zhang1
1School of Mechanical Engineering, Zhengzhou University, Zhengzhou 450001, China.
Molecular dynamics simulations reveal that van der Waals forces and atom diffusion enhance copper nanocone bonding strength. Optimal adhesion is achieved by controlling separation distance, contact length, temperature, and cone angle.
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