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Design and Optimization of the Resonator in a Resonant Accelerometer Based on Mode and Frequency Analysis
Yan Li1, Biao Jin1, Mengyu Zhao1
1School of Mechanical Electronic & Information Engineering, China University of Mining and Technology-Beijing, Beijing 100083, China.
Micromachines
|June 2, 2021
Summary
This study presents a novel method for designing resonant accelerometers by optimizing resonator structure using frequency analysis. This approach enhances performance and ensures operational stability for practical sensor applications.
Area of Science:
- Mechanical Engineering
- Sensor Technology
- Vibration Analysis
Background:
- Resonant accelerometers offer high sensitivity but require precise resonator design.
- Mode and frequency analysis are crucial for optimizing resonator performance and avoiding interference.
Purpose of the Study:
- To develop and validate methods for designing and optimizing the resonator in a resonant accelerometer.
- To enhance accelerometer performance through precise structural parameter tuning based on mode and frequency analysis.
Main Methods:
- Derivation of dynamic control equations using Hamilton's principle.
- Resonator mode and frequency analysis for structural parameter optimization.
- Finite element simulation and 1 g acceleration tumbling experiments for validation.
Main Results:
- The optimized accelerometer achieved a sensitivity of 98 Hz/g.
- Demonstrated a resolution of 0.917 mg and bias stability of 1.323 mg/h.
- Validated the effectiveness of mode and frequency analysis in avoiding interference modes.
Conclusions:
- The proposed design and optimization method is feasible for practical resonant accelerometer development.
- Tuning structural parameters based on mode and frequency analysis ensures optimal working modes and avoids resonance.
- Findings are beneficial for the practical design of resonant sensors.
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