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Selective Direct Laser Writing of Pyrolytic Carbon Microelectrodes in Absorber-Modified SU-8.

Emil Ludvigsen1, Nina Ritter Pedersen1, Xiaolong Zhu2

  • 1National Centre for Nano Fabrication and Characterization, DTU Nanolab, Technical University of Denmark, Ørsteds Plads, Building 345B, 2800 Kgs. Lyngby, Denmark.

Micromachines
|June 2, 2021
PubMed
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Researchers developed a new method to create pyrolytic carbon microelectrodes (PCMEs) using a laser to selectively pyrolyze SU-8 photoresist. This inexpensive technique allows for precise patterning of conductive carbon lines for advanced applications.

Area of Science:

  • Materials Science
  • Nanotechnology
  • Electrochemistry

Background:

  • Pyrolytic carbon microelectrodes (PCMEs) offer advantages over traditional metallic electrodes.
  • Simple, cost-effective patterning methods for PCMEs are needed for wider adoption.

Purpose of the Study:

  • To demonstrate a novel fabrication technique for PCMEs using selective laser pyrolysis.
  • To investigate the influence of laser parameters on the properties of pyrolytic carbon lines.

Main Methods:

  • Selective pyrolysis of SU-8 photoresist, modified with an absorber (Pro-Jet 800NP), using an 806 nm diode laser.
  • Local Laser Pyrolysis (LLP) process conducted in a nitrogen atmosphere.
  • Controlled laser power and scan speed to influence conductivity and line dimensions.
Keywords:
SU-8carbondirect laser writinglaser pyrolysismicroelectrodespyrolysis

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Main Results:

  • Achieved conductivity up to 14.2 ± 3.3 S/cm for laser-pyrolyzed carbon lines.
  • Fabricated conductive lines with widths as narrow as 13.5 ± 0.4 µm.
  • Demonstrated direct laser writing of adjacent lines with gaps ≤5 µm and complex electrode designs.

Conclusions:

  • The LLP method provides a simple, inexpensive, and effective way to pattern PCMEs.
  • The process allows for controlled fabrication of conductive carbon structures with tunable properties.
  • This technique enables the creation of intricate microelectrode designs for diverse applications.