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Microdisplacement Measurement Based on F-P Etalon: Processing Method and Experiments.

Xiaoyan Shen¹, Shinan Zhou¹, Dongsheng Li¹

¹College of Metrology and Measurement Engineering, China Jiliang University, Hangzhou 310018, China.

Sensors (Basel, Switzerland)

|June 2, 2021

Summary

This summary is machine-generated.

This study introduces an improved method for precise microdisplacement measurements using Fabry-Perot (F-P) fringe patterns. The new secondary coordinate rotation (SCR) technique enhances accuracy in calculating fringe center coordinates for F-P interferometry.

Keywords:

Fabry–Perot etalon circular regression focusing control microdisplacement measurement multichord averaging method

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Area of Science:

Optics and Photonics
Metrology
Instrumentation

Background:

Accurate microdisplacement measurement is crucial in various scientific and industrial applications.
Fabry-Perot (F-P) interferometry provides a robust method for displacement sensing.
Existing algorithms for processing F-P fringe patterns face limitations in accuracy and precision.

Purpose of the Study:

To develop and validate an enhanced data processing method for accurate microdisplacement measurements from 2D F-P fringe patterns.
To improve the calculation accuracy of the concentric ring center coordinates in F-P interference imaging.
To compare the performance of novel algorithms against existing methods for fringe analysis.

Main Methods:

Development of a secondary coordinate rotation (SCR) by 45 degrees method to reduce virtual pixel intervals and enhance center coordinate accuracy.
Analysis and comparison of multichord averaging method (MCAM) and circular regression method (CRM) for circle fitting.
Experimental validation of the proposed SCR method and MCAM for displacement measurement.

Main Results:

The SCR method significantly improves the accuracy of center coordinate calculation compared to the conventional coordinate rotation (CR) method.
The MCAM demonstrates superior suitability for center coordinate calculation over the CRM.
Experimental results show a standard deviation of approximately 0.009 µm for the circle center and an extended uncertainty of ~0.03 µm for 5 mm displacement measurements.

Conclusions:

The proposed SCR method offers higher accuracy for F-P fringe pattern analysis.
MCAM is a more suitable algorithm for precise circle center determination in F-P interferometry.
The developed data processing technique has broad applicability in F-P interferometry for microdisplacement sensing.