Quantum tomography of an entangled three-qubit state in silicon

Quantum entanglement is a fundamental property of coherent quantum states and an essential resource for quantum computing¹. In large-scale quantum systems, the error accumulation requires concepts for quantum error correction. A first step toward error correction is the creation of genuinely multipartite entanglement, which has served as a performance benchmark for quantum computing platforms such as superconducting circuits^2,3, trapped ions⁴ and nitrogen-vacancy centres in diamond⁵. Among the candidates for large-scale quantum computing devices, silicon-based spin qubits offer an outstanding nanofabrication capability for scaling-up. Recent studies demonstrated improved coherence times^6-8, high-fidelity all-electrical control^9-13, high-temperature operation^14,15 and quantum entanglement of two spin qubits^9,11,12. Here we generated a three-qubit Greenberger-Horne-Zeilinger state using a low-disorder, fully controllable array of three spin qubits in silicon. We performed quantum state tomography¹⁶ and obtained a state fidelity of 88.0%. The measurements witness a genuine Greenberger-Horne-Zeilinger class quantum entanglement that cannot be separated into any biseparable state. Our results showcase the potential of silicon-based spin qubit platforms for multiqubit quantum algorithms.