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Fabrication and Characterization of Thickness Mode Piezoelectric Devices for Atomization and Acoustofluidics
Published on: August 5, 2020
Millisecond phonon lifetimes in piezoelectric nanomechanical resonators
Oliver A Hitchcock1,2, Matthew P Maksymowych1, Kaveh Pezeshki1
1Department of Applied Physics and Ginzton Laboratory, Stanford University, Stanford, CA, USA.
Abstract:
Piezoelectric nanomechanical resonators operating at gigahertz frequencies are a promising platform for quantum information processing and precision sensing, but phonon lifetimes have been limited to the microsecond range, widely attributed to the higher intrinsic loss of piezoelectric materials. Here we show that this limitation is not fundamental. Using a fabrication process informed by recent studies of defect-mediated loss in lithium niobate, we combine the chemical restoration of ion-milled surfaces with a shadow-mask metallization process to produce lithium niobate phononic crystal resonators with inferred internal phonon lifetimes of up to 21 ms at 3.6 GHz, corresponding to quality factors exceeding 4 × 108 (f × Qi > 1018) at millikelvin temperatures. By systematically varying the electrode-to-resonator spacing, we demonstrate that the measured lifetime is set by external coupling between the device and measurement circuit rather than material loss. This establishes that lithium niobate, once fabrication-induced surface damage is removed, achieves an intrinsic quality comparable with the best mechanical materials while remaining an intrinsically piezoelectric platform with strong electromechanical coupling.
