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Updated: Nov 2, 2025

Design and Characterization Methodology for Efficient Wide Range Tunable MEMS Filters
Published on: February 4, 2018
Multilevel resistive random access memory achieved by MoO3/Hf/MoO3stack and its application in tunable high-pass
Sheng Li Fang1, Chuan Yu Han1, Wei Hua Liu1
1School of Microelectronics, Faculty of Electronics and Information Engineering, Xi'an Jiaotong University, Xi'an 710049, People's Republic of China.
Multilevel resistive random access memories (RRAMs) with four stable states were developed. These RRAMs enable tunable high-pass filters, showing potential for advanced neural networks and low-power electronics.
Area of Science:
- Materials Science
- Electrical Engineering
- Nanotechnology
Background:
- Resistive random access memories (RRAMs) are promising for next-generation electronic devices.
- Achieving multilevel resistance states is crucial for higher data storage density and complex functionalities.
- Tunable filters are essential components in various electronic systems.
Purpose of the Study:
- To develop and characterize multilevel RRAM devices with multiple stable resistance states.
- To investigate the resistive switching mechanism in the fabricated RRAM structure.
- To demonstrate the application of these multilevel RRAMs in creating tunable high-pass filters.
Main Methods:
- Fabrication of Pt/MoO3/Hf/MoO3/Pt stack for multilevel RRAM.
- Experimental characterization of device performance, including retention and memory window.
- Electrical analysis using current-voltage (I-V) measurements and fitting to conduction models (Poole-Frenkel, Ohmic).
- Simulation of device behavior and RRAM-based tunable high-pass filter (HPF).
Main Results:
- Achieved RRAM devices with four stable resistance states and good retention (>10^4 s).
- Demonstrated a large memory window (>10^4) for the multilevel RRAMs.
- Identified the switching mechanism as a combination of conductive filament formation and redox reactions.
- Conduction mechanisms identified as Poole-Frenkel emission (HRS) and Ohmic conduction (LRS).
- Successfully realized a tunable high-pass filter with configurable characteristics using the multilevel RRAMs.
Conclusions:
- The developed multilevel RRAMs exhibit excellent performance characteristics.
- The understanding of the resistive switching mechanism provides insights for further device optimization.
- The successful implementation of tunable HPFs highlights the potential of these RRAMs for applications in spiking neural networks and compact, low-power electronic filters.
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