The Recent Progress of MEMS/NEMS Resonators.

Area of Science:

• Physics
• Engineering
• Materials Science

Background:

• Micro-Electro-Mechanical Systems (MEMS) and Nano-Electro-Mechanical Systems (NEMS) resonators are crucial for biological detection, physical sensing, and quantum coupling.
• Existing research extensively explores various resonator structures and their applications.

Purpose of the Study:

• To review the latest research progress of MEMS/NEMS resonators with diverse structures.
• To classify resonators by structure and summarize their working principles, resonance performance, and applications.

Main Methods:

• Review of literature on single/double-clamped resonators, hemispherical, microdisk, drum, and tuning fork structures.
• Discussion of surface acoustic wave (SAW) and bulk acoustic wave (BAW) resonators.
• Analysis of material properties, resonance modes, and testing methods.

Main Results:

• Detailed introduction to resonance performance, testing, and manufacturing of clamped resonators and their applications (mass sensing, thermal analysis, quantum detection, oscillators).
• Review of material properties, resonance modes, and applications (gyroscopes) of hemispherical, microdisk, and drum resonators.
• Discussion of SAW and BAW resonators' principles, sensing methods, and novel applications (humidity sensing, spin control).

Conclusions:

• MEMS/NEMS resonators exhibit diverse structures and significant potential across various scientific and technological fields.
• This review provides a comprehensive classification and summary of resonator technologies, highlighting their current state and future prospects.