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Real-Time DC-dynamic Biasing Method for Switching Time Improvement in Severely Underdamped Fringing-field Electrostatic MEMS Actuators
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An Electrostatic Self-Excited Resonator with Pre-Tension/Pre-Compression Constraint for Active Rotation Control
Ruide Yun1, Yangsheng Zhu1, Zhiwei Liu1,2,3,4
1School of Energy and Power Engineering, Beihang University, Beijing 100191, China.
Micromachines
|July 2, 2021
Summary
This study introduces a novel electrostatic resonator using DC voltage and adjustable constraints. It demonstrates control over the microbeam
Area of Science:
- MEMS (Micro-Electro-Mechanical Systems)
- Nanotechnology
- Applied Physics
Background:
- Electrostatic resonators are crucial for micro-scale devices.
- Controlling velocity-position characteristics is key for micro-robot propulsion.
- Existing methods often lack simple, adaptable constraint mechanisms.
Purpose of the Study:
- To develop a novel electrostatic self-excited resonator.
- To achieve variable velocity-position characteristics using pre-tension/pre-compression.
- To explore its potential for micro-robot propulsion applications.
Main Methods:
- Designed a resonator with a simply supported micro-beam and plate electrodes.
- Implemented adjustable constraint bases to control pre-tension or pre-compression.
- Utilized DC voltage to drive the electrostatic self-excitation.
Main Results:
- Demonstrated variable velocity-position control by adjusting beam constraints.
- Observed maximum oscillating velocity near electrodes under pre-compression.
- Observed maximum oscillating velocity at the middle position under pre-tension.
Conclusions:
- The novel electrostatic resonator offers tunable velocity-position output.
- Simple constraint adjustment allows for precise control of oscillation dynamics.
- High potential for micro-robot propulsion, including flapping wing control.
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