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Updated: Oct 28, 2025

09:46
Fabrication and Characterization of High-Q Silicon Nitride Membrane Resonators
Published on: August 8, 2025
533
Disk-loaded silicon micro-ring resonator for high-Q resonance.
Optics Express
|July 16, 2021
Summary
Adding disks to silicon micro-ring resonators achieves ultra-high quality factors (Q) and slope rates. This innovation enhances optical sensing and modulation applications with a novel, easily fabricated device.
Area of Science:
- Photonics and optical engineering
- Nanotechnology and materials science
Background:
- Micro-ring resonators (MRRs) are fundamental components in integrated photonics.
- Achieving high-quality factors (Q) and specific spectral features in MRRs is crucial for advanced applications.
- Existing designs often face limitations in Q-factor, spectral control, or fabrication complexity.
Purpose of the Study:
- To introduce a novel silicon micro-ring resonator design incorporating two disks.
- To achieve ultra-high quality factors (Q) and enhanced slope rates.
- To explore the device's potential for sensing and modulation applications.
Main Methods:
- Modification of a standard silicon micro-ring resonator by adding two disks.
- Development and application of a circuit model to analyze device performance and reflections.
- Investigation of spectral features across different coupling regimes.
Main Results:
- Attainment of an asymmetric resonance with Q values up to 7.773 × 105 and slope rates exceeding 880 dB/nm.
- Demonstration of three distinct operational regimes based on coupling coefficients.
- Observation of spectral discontinuities introduced by disks, offering design flexibility.
- Achieved high extinction ratio (ER) around 1550 nm.
- High sensitivity (ΔλRes/Δn > 299 nm/RIU) demonstrated.
Conclusions:
- The proposed two-disk silicon micro-ring resonator significantly enhances Q-factor and slope rate.
- The design is compatible with standard silicon photonics technology without extra materials or steps.
- The device shows strong potential for high-performance optical sensing and modulation applications.

