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ZnO Films Incorporation Study on Macroporous Silicon Structure
Lizeth Martínez1, Godofredo García-Salgado2, Francisco Morales-Morales3
1Tepeji Graduate School, Industrial Engineering, Autonomous Hidalgo State University, Av. del Maestro No. 41, Col. Noxtongo 2ª Sección, Tepeji del Rio, Hidalgo 42855, Mexico.
Materials (Basel, Switzerland)
|July 19, 2021
Summary
We created novel hybrid nanostructures using zinc oxide (ZnO) films on macroporous silicon. These structures exhibit enhanced properties, showing potential for highly sensitive gas sensors.
Area of Science:
- Materials Science
- Nanotechnology
- Surface Science
Background:
- Macroporous silicon (MPS) offers a unique template for nanostructure growth.
- Zinc oxide (ZnO) is a versatile material with applications in sensing.
Purpose of the Study:
- To develop hybrid nanostructures of ZnO films on MPS substrates.
- To investigate the influence of MPS on ZnO film morphology and properties.
- To explore the potential of these nanostructures for gas sensing applications.
Main Methods:
- Sol-gel spin coating and ultrasonic spray pyrolysis (USP) for ZnO deposition.
- UV-visible spectroscopy, X-ray diffraction (XRD), scanning electron microscopy (SEM), and atomic force microscopy (AFM) for characterization.
Main Results:
- XRD confirmed the positive impact of MPS on ZnO structural properties.
- SEM revealed granular and flake-like ZnO crystals growing within MPS pores.
- AFM showed a significant increase (up to one order of magnitude) in root mean square roughness (RMS).
Conclusions:
- The developed methods effectively cover porous substrates and create desirable ZnO nano-morphologies.
- The unique nanostructures are promising for the fabrication of highly sensitive gas sensors.
