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Updated: Oct 25, 2025

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Published on: June 23, 2023
Dose measurement in the TEM and STEM
1Physics Department, University of Alberta, Edmonton, Canada T6G 2E1.
Abstract:
Practical aspects of dosimetry are considered, including the measurement of electron-beam current and current density. Complications that arise in the case of a focused probe or a STEM image are discussed and solutions proposed. Advantages of expressing the radiation dose in Grays are listed and a simple formula given for converting electron fluence to Gray units, based on a near constancy of the stopping power per atomic electron. Comparisons with stopping-power calculations and EELS measurements suggest that this formula is accurate to within 5%. Based on the stopping power formula, a new way of measuring the local mass-thickness of light-element specimens is proposed. The average energy loss per inelastic collision is shown to be higher than previous expectations.
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