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Updated: May 16, 2025

Targeted Studies Using Serial Block Face and Focused Ion Beam Scan Electron Microscopy
Published on: August 10, 2019
Two- and three-dimensional electron imaging of beam-sensitive specimens
1Physics Department, University of Alberta, Edmonton T6G 2E1, Canada.
Abstract:
Radiation damage is the main factor that determines the spatial resolution of TEM and STEM images of beam-sensitive specimens, its influence being well represented by a dose-limited resolution (DLR). In this review, DLR is defined and evaluated for both thin and thick samples, for all common imaging modes, and for electron-accelerating voltages up to 3 MV. Damage mechanisms are discussed (including beam heating and electrostatic charge accumulation) with an emphasis on recently published work. Experimental methods for reducing beam damage are identified and future lines of investigation are suggested.
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