Related Experiment Video
Updated: Oct 25, 2025
11:45
Experimental Methods for Trapping Ions Using Microfabricated Surface Ion Traps
Published on: August 17, 2017
14.8K
A Miniature Four-Channel Ion Trap Array Based on Non-silicon MEMS Technology.
Qi Zhang1,2, Xichi Lu1,2, Ting Chen1,2
1National Key Laboratory of Science and Technology on Micro/Nano Fabrication, Shanghai Jiao Tong University, Shanghai 200240, China.
Micromachines
|August 6, 2021
Summary
A high-performance miniature mass spectrometer was developed using a four-channel ion trap array. This device achieves a mass resolution of 324 for butyl diacetate, demonstrating feasibility for portable analytical applications.
Area of Science:
- Analytical Chemistry
- Instrumentation Science
Background:
- Miniaturization of mass spectrometers is crucial for portable applications, but often leads to reduced precision.
- Optimizing ion trap design is key to balancing size reduction with high performance.
Purpose of the Study:
- To develop a high-performance miniature mass spectrometer with improved mass resolution and extraction efficiency.
- To analyze the relationship between structural parameters and performance of a rectangular ion trap array.
Main Methods:
- Simulations were performed to determine optimal structural parameters for the ion trap array.
- A miniature four-channel ion trap array (MFITA) was fabricated using MEMS and laser etching technologies.
- Mass spectrometry experiments were conducted to evaluate the performance of the fabricated MFITA.
Main Results:
- Optimal values for field radius (y0) and ion exit slot width (s0) were identified as 1.61 mm and 200 μm, respectively.
- The fabricated MFITA achieved a mass resolution of 324 for butyl diacetate (m/z = 230).
- Four-channel consistency was verified through air sample analysis, demonstrating reliable performance.
Conclusions:
- The structural design of the MFITA is validated through experimental results.
- MEMS fabrication techniques are feasible for producing high-performance miniature mass spectrometers.
- This work provides guidance for future development and optimization of miniature mass spectrometers.
