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Related Experiment Video

Updated: Oct 22, 2025

Large-area Scanning Probe Nanolithography Facilitated by Automated Alignment and Its Application to Substrate Fabrication for Cell Culture Studies

Large-area Scanning Probe Nanolithography Facilitated by Automated Alignment and Its Application to Substrate Fabrication for Cell Culture Studies

Published on: June 12, 2018

The Nanolithography Toolbox.

Krishna C Balram^1,2, Daron A Westly¹, Marcelo Davanço¹

¹National Institute of Standards and Technology, Gaithersburg, MD 20899 USA.

Journal of Research of the National Institute of Standards and Technology

|August 26, 2021

Summary

This summary is machine-generated.

The Nanolithography Toolbox is a new software for designing nanoscale devices. It enables rapid, complex pattern generation using parameterized shapes and scripting for micro- and nanoelectromechanical systems and nanophotonics.

Keywords:

CAD lithography nanofabrication nanofluidic nanophotonic nanoplasmonic nanoscale curved features nanoscale design nanoscale devices

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Last Updated: Oct 22, 2025

Large-area Scanning Probe Nanolithography Facilitated by Automated Alignment and Its Application to Substrate Fabrication for Cell Culture Studies

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Published on: November 12, 2014

Area of Science:

Nanotechnology
Materials Science
Electrical Engineering

Background:

Designing nanoscale devices requires specialized tools for complex geometries.
Existing methods can be cumbersome for intricate pattern generation.

Purpose of the Study:

Introduce the Nanolithography Toolbox, a software for scripted lithography pattern layout.
Facilitate the design of nanoscale devices with complex curves and critical dimensions.

Main Methods:

Utilizes parameterized shapes as fundamental building blocks.
Enables rapid design and layout through scripting and programming.
Offers libraries for micro- and nanoelectromechanical systems (MEMS/NEMS) and nanophotonic devices.

Main Results:

Allows precise control over shape parameters, including vertex count and Bezier curves.
Facilitates the creation of smooth, complex curves for device designs.
Supports arbitrary complexity in nanoscale device layouts.

Conclusions:

The Nanolithography Toolbox is a versatile, platform-independent software solution.
Applicable to a wide range of microscale and nanoscale device fabrication tasks.
Empowers users to design sophisticated devices efficiently.