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Research on Trimming Frequency-Increasing Technology for Quartz Crystal Resonator Using Laser Etching
Jun-Lin Zhang1, Shuang Liao2, Cheng Chen2
1College of Materials Science and Engineering, Sichuan University, Chengdu 610064, China.
Micromachines
|August 27, 2021
Summary
Laser trimming precisely adjusts quartz crystal resonator (QCR) frequencies by thinning electrodes. This method achieves high accuracy (1 ppm) but risks performance degradation and resonator failure if electrodes are over-etched.
Area of Science:
- Electrical Engineering
- Materials Science
- Physics
Background:
- Quartz crystal resonators (QCRs) are vital electronic components.
- Accurate frequency tuning is challenging in mass-produced QCRs due to manufacturing variations.
Purpose of the Study:
- To develop a precise method for adjusting QCR frequencies.
- To investigate the impact of laser etching on QCR performance and reliability.
Main Methods:
- Utilized a 532 nm laser to locally thin QCR electrodes on a 10 MHz quartz wafer.
- Developed a processing pattern for controlled electrode etching.
- Analyzed the effects of laser etching on silicon dioxide and resonator performance parameters.
Main Results:
- Achieved precise frequency trimming with 1 ppm accuracy and consistent frequency distribution.
- Observed minimal changes in equivalent parameters for optimized etching.
- Significant degradation in quality factor (Q) and frequency drift (>40%) occurred with through-hole etching, leading to resonator failure due to thermal effects.
Conclusions:
- Laser partial etching is an effective technique for QCR frequency trimming, offering high precision.
- Careful control of laser etching is crucial to avoid detrimental effects on resonator performance and prevent piezoelectric effect loss.
