Research on Decomposition of Offset in MEMS Capacitive Accelerometer.

Area of Science:

• Electrical Engineering
• Mechanical Engineering
• Materials Science

Background:

• Offset in micro-electro-mechanical systems (MEMS) capacitive accelerometers arises from complex mechanical and electrical factors.
• This offset significantly deteriorates accelerometer performance, necessitating effective reduction strategies.

Purpose of the Study:

• To propose and validate a novel decomposition method for analyzing offset in MEMS capacitive accelerometers.
• To quantitatively analyze offset compositions and identify key contributing parameters.

Main Methods:

• Developed a quantitative analysis framework for MEMS accelerometer offset.
• Established methods for measuring critical offset-related parameters.
• Applied the decomposition method to a closed-loop MEMS capacitive accelerometer experiment.

Main Results:

• Successfully decomposed the offset in the MEMS capacitive accelerometer.
• Identified fabricated gap mismatch in the MEMS sensor as the major source of offset.
• Demonstrated the efficacy of the proposed decomposition technique.

Conclusions:

• The proposed offset decomposition method offers a new approach for analyzing MEMS capacitive accelerometers.
• Understanding the major offset source (gap mismatch) enables targeted improvements.
• This work facilitates purposeful steps to reduce offset and enhance accelerometer performance.