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Related Concept Videos

Semiconductors01:22

Semiconductors

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There is variation in the electrical conductivity of materials - metals, semiconductors, and insulators that are showcased with the help of the energy band diagrams.
Metals such as copper (Cu), zinc (Zn), or lead (Pb) have low resistivity and feature conduction bands that are either not fully occupied or overlap with the valence band, making a bandgap non-existent. This allows electrons in the highest energy levels of the valence band to easily transition to the conduction band upon gaining...
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A Miniaturised, Fully Integrated NDIR CO2 Sensor On-Chip.

Xiaoning Jia1,2, Joris Roels3, Roel Baets1,2

  • 1Photonics Research Group, INTEC, Ghent University-Imec, Technologiepark 126, 9052 Gent, Belgium.

Sensors (Basel, Switzerland)
|August 28, 2021
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Summary

This study introduces a novel, silicon-based Non-dispersive Infrared (NDIR) CO2 sensor. The miniaturized device demonstrates a detection limit of 750 ppm, with minimal water vapor interference, paving the way for low-cost gas sensing.

Keywords:
CO2 sensorNDIRoptical sensorsilicon photonics

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Area of Science:

  • Optoelectronics
  • Integrated Photonics
  • Gas Sensing Technology

Background:

  • Accurate carbon dioxide (CO2) monitoring is crucial for environmental and industrial applications.
  • Existing NDIR sensors often lack miniaturization and cost-effectiveness.
  • Silicon photonics offers a platform for integrated optical sensing solutions.

Purpose of the Study:

  • To develop and characterize a fully integrated NDIR CO2 sensor on a silicon chip.
  • To assess the sensor's performance, including limit of detection and cross-sensitivity.
  • To explore the potential for low-cost, miniaturized NDIR CO2 sensing.

Main Methods:

  • Fabrication of an NDIR CO2 sensor using wafer bonding of silicon substrates.
  • Integration of a mid-infrared (mid-IR) LED and two photodiodes.
  • Utilizing an integrating cylinder with access waveguides for optical path.
  • Experimental and numerical analysis of CO2 detection and water vapor cross-sensitivity.

Main Results:

  • Achieved a limit of detection of approximately 750 ppm for CO2.
  • Observed no significant water vapor interference in experimental tests.
  • Numerical simulations confirmed negligible impact of water vapor absorption.
  • Identified temperature fluctuations as a factor affecting long-term stability.

Conclusions:

  • The integrated silicon NDIR CO2 sensor shows promising performance for gas detection.
  • The design minimizes water vapor interference, enhancing reliability.
  • Wafer-level fabrication and use of bare chip components suggest potential for low-cost, high-volume production.
  • Further optimization is needed to address temperature-dependent stability for enhanced long-term performance.