Modeling and Optimization of a Novel ScAlN-Based MEMS Scanning Mirror with Large Static and Dynamic Two-Axis Tilting...

Area of Science:

• Materials Science
• Mechanical Engineering
• Electrical Engineering

Background:

• Piezoelectric micro-electro-mechanical systems (MEMS) scanning mirrors are crucial for optoelectronics.
• Existing designs face limitations in CMOS compatibility, control, mirror size, and angular travel.

Purpose of the Study:

• To present a novel, efficient ScAlN-based piezoelectric MEMS mirror with a 10 mm pupil size.
• To optimize device designs through theoretical modeling, simulations, and comparative analysis.

Main Methods:

• Development of a MEMS mirror featuring a reflection plate, meandering springs, and eight Union Jack-shaped trapezoidal actuators.
• Theoretical modeling and simulations to analyze two distinct device designs (1 mm and 10 mm mirror sizes).
• Comparative analysis of static and dynamic tilting angles under varying DC and AC driving voltages.

Main Results:

• Device A (1 mm mirror) achieved static tilting angles of ±36.2° (orthogonal/diagonal).
• Device B (10 mm mirror) achieved static tilting angles of ±36.0° (horizontal) and ±35.9° (diagonal) at 200 VDC.
• Dynamic tilting angles demonstrated linear increases with driving voltage, reaching ±8.1°/Vpp (orthogonal) and ±8.9°/Vpp (diagonal) at 10 Hz.

Conclusions:

• The ScAlN-based piezoelectric MEMS mirror offers significant angular travel and improved performance.
• The Union Jack-shaped actuator arrangement is a promising design for high-performance optical devices.
• This technology advances MEMS scanning mirror capabilities for demanding optoelectronic applications.