A Finite-Difference Approach for Plasma Microwave Imaging Profilometry.

Loreto Di Donato1,2, David Mascali2, Andrea F Morabito3

  • 1Department of Electrical, Electronics and Computer Engineering (DIEEI), University of Catania, viale A. Doria 6, 95126 Catania, Italy.

Journal of Imaging
|August 30, 2021
PubMed
Summary

Microwave imaging profilometry (MIP) offers volumetric plasma diagnostics, overcoming limitations of standard methods. This study presents a finite-difference frequency-domain approach for improved plasma profiling in reactors.