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Silicon Based Coplanar Capacitive Device for Liquid Sensor Applications.

Andrea G Martinez-Lopez1,2, David E Guzmán-Caballero3, Israel Mejia3

  • 1Micro and Nanotechnology Research Centre (MICRONA), Universidad Veracruzana, Veracruz 94294, Mexico.

Sensors (Basel, Switzerland)
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Summary

This study presents a silicon-based interdigitated capacitive sensor for liquid detection. The device

Keywords:
capacitive coplanar sensorliquid sensorparasitic capacitances

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Area of Science:

  • Materials Science and Engineering
  • Electrical Engineering
  • Sensor Technology

Background:

  • Silicon-based sensor devices are crucial for advancing integrated smart sensor technologies.
  • Capacitive sensor devices offer a versatile platform for diverse applications.
  • Accurate modeling of capacitive sensors, including substrate effects, is essential for reliable performance.

Purpose of the Study:

  • To present an interdigitated coplanar capacitive sensor fabricated on a silicon substrate.
  • To demonstrate the sensor's potential for liquid sensing applications.
  • To develop and validate a comprehensive capacitance model accounting for parasitic substrate capacitances.

Main Methods:

  • Fabrication of an interdigitated coplanar capacitive sensor on a silicon substrate.
  • Development of a detailed capacitance model incorporating parasitic substrate capacitances.
  • Theoretical validation using finite-element simulations and experimental validation with fabricated devices.
  • Integration of a polydimethylsiloxane (PDMS) mold for liquid sample collection.

Main Results:

  • Successful fabrication and demonstration of a silicon-based interdigitated capacitive sensor.
  • Validation of the developed capacitance model through simulations and experimental data.
  • Demonstration of the sensor's sensitivity to changes in the dielectric constant of the medium, indicating liquid sensing capability.

Conclusions:

  • The presented interdigitated coplanar capacitive sensor on silicon is a viable technology for liquid sensing.
  • The developed capacitance model accurately predicts device behavior, including substrate effects.
  • Guidelines for enhancing sensor performance have been identified for future development.