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Characterization of SiN Integrated Optical Phased Arrays on a Wafer-Scale Test Station
Published on: April 1, 2020
Alexander Dabsch1, Christoph Rosenberg1, Majesa Trimmel1
1Institute of Sensor and Actuator Systems, University of Technology Vienna, 1040 Vienna, Austria.
This study introduces a novel silicon/glass optical sensor for precise axial angle measurements. It utilizes light diffraction and self-referencing to achieve high-resolution angular detection.
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