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Photo and Soft Lithography for Organ-on-Chip Applications
Erika Ferrari1, Federico Nebuloni1,2, Marco Rasponi1
1Department of Electronics, Information and Bioengineering, Politecnico di Milano, Milan, Italy.
Methods in Molecular Biology (Clifton, N.J.)
|September 14, 2021
Summary
This chapter details photolithography methods for fabricating Organs-on-Chip devices. Liquid and dry photolithography techniques are explained, forming patterned molds for microdevice production.
Area of Science:
- Microfabrication
- Biotechnology
- Materials Science
Background:
- Organs-on-Chip (OoC) devices are crucial for advanced biological research and drug testing.
- Fabrication of these microdevices commonly relies on photolithography and soft lithography.
Purpose of the Study:
- To describe two distinct photolithography techniques for creating patterned molds.
- To explain the subsequent soft lithography process for polymer-based microdevice fabrication.
Main Methods:
- Detailed explanation of liquid photolithography involving spin-coating photoresist on silicon wafers.
- Description of dry photolithography using resist dry film lamination.
- Discussion of UV light patterning via photomasks or direct laser exposure.
Main Results:
- Successful patterning of silicon wafers using both liquid and dry photolithography methods.
- Demonstration of patterned wafers as molds for replica molding in soft lithography.
Conclusions:
- Photolithography is a key enabling technique for Organs-on-Chip fabrication.
- Both liquid and dry methods offer viable routes for creating microdevice molds, facilitating polymer-based microdevice production.
