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Fabrication and Testing of Microfluidic Optomechanical Oscillators
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Post-fabrication tuning of microring resonators using 3D-printed microfluidics
Optics Letters
|September 15, 2021
Summary
We developed a 3D-printed microfluidic chip to tune silicon microring resonators. This method achieved a full free spectral range shift using NaCl solutions, demonstrating efficient resonant frequency control.
Area of Science:
- Photonics
- Microfluidics
- Materials Science
Background:
- Silicon microring resonators are key components in photonic integrated circuits.
- Tuning resonant frequencies is crucial for device functionality and applications.
- Existing tuning methods often require continuous energy input or complex fabrication.
Purpose of the Study:
- To demonstrate a novel method for tuning the resonant frequencies of silicon microring resonators.
- To utilize a 3D-printed microfluidic chip for precise control of resonator properties.
- To achieve tuning with zero energy consumption post-initialization.
Main Methods:
- Fabrication of a 3D-printed microfluidic chip.
- Overlaying the microfluidic chip directly onto a silicon microring resonator photonic circuit.
- Introducing aqueous solutions of varying sodium chloride (NaCl) concentrations.
- Monitoring resonant frequency shifts using optical measurements.
Main Results:
- A full free spectral range shift was observed at 10% NaCl concentration.
- A resonant wavelength shift of 1.514 nm was achieved for a 60 µm microring resonator.
- The demonstrated sensitivity was 89.05 nm/RIU for a cladding refractive index change of 0.017 RIU.
Conclusions:
- The 3D-printed microfluidic chip offers an effective, zero-energy-consumption method for tuning microring resonator frequencies.
- This technique provides a sensitive and scalable approach for optical sensor development and wavelength control.
- The demonstrated method holds promise for applications in tunable photonic devices and integrated optics.

