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Published on: January 23, 2013
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Continuous roll-to-roll patterning of three-dimensional periodic nanostructures
I-Te Chen1,2, Elizabeth Schappell1, Xiaolong Zhang1
1Department of Mechanical and Aerospace Engineering, North Carolina State University, Raleigh, NC 27695 USA.
Microsystems & Nanoengineering
|September 27, 2021
Summary
A new roll-to-roll system continuously prints large-area 3D periodic nanostructures using colloidal nanosphere assembly and near-field nanolithography. This scalable nanomanufacturing platform demonstrates high yield and repeatability for applications in nanophotonics and advanced materials.
Area of Science:
- Materials Science
- Nanotechnology
- Optics
Background:
- Continuous large-area fabrication of 3D periodic nanostructures remains a challenge.
- Existing nanolithography techniques often lack scalability and high throughput.
- Precise control over 3D nanostructure geometry is crucial for advanced applications.
Purpose of the Study:
- To develop a scalable roll-to-roll system for continuous 3D periodic nanostructure printing.
- To demonstrate the application of Langmuir-Blodgett assembly and Talbot effect for nanolithography.
- To evaluate the patterning yield, uniformity, and long-term repeatability of the developed system.
Main Methods:
- Utilized Langmuir-Blodgett assembly of colloidal nanospheres for light diffraction.
- Employed near-field nanolithography driven by Talbot effect for 3D nanostructure definition.
- Developed an automated electron beam inspection method for quantitative yield and uniformity analysis.
Main Results:
- Demonstrated continuous printing of 3D photonic crystals with 500 nm period on flexible substrates (50 × 200 mm²).
- Achieved a system throughput of 3 mm/s.
- Attained up to 88% patterning yield over 4 months and 78.6% average yield over full substrate areas.
Conclusions:
- The developed roll-to-roll system offers a versatile and scalable nanomanufacturing platform.
- The method enables precise design of 3D nanostructures by tuning sphere diameter and wavelength.
- Potential applications include nanophotonics, nanoarchitected materials, and multifunctional nanostructures.
