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Related Experiment Video

Updated: Oct 19, 2025

Design and Characterization Methodology for Efficient Wide Range Tunable MEMS Filters

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Published on: February 4, 2018

Programmable synchronization enhanced MEMS resonant accelerometer.

Liu Xu¹, Shudong Wang¹, Zhuangde Jiang¹

¹State Key Laboratory for Manufacturing Systems Engineering, Xi'an Jiaotong University, Xi'an, 710049 China.

Microsystems & Nanoengineering

|September 27, 2021

Summary

This summary is machine-generated.

Researchers improved microelectromechanical resonant accelerometer resolution fivefold using a synchronized oscillator enhancement approach. This novel method boosts stability and covers a wide acceleration measurement range for advanced applications.

Keywords:

Electrical and electronic engineering Sensors

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Using Micro-Electro-Mechanical Systems MEMS to Develop Diagnostic Tools

Using Micro-Electro-Mechanical Systems MEMS to Develop Diagnostic Tools

Published on: October 1, 2007

Area of Science:

Physics
Electrical Engineering
Materials Science

Background:

Acceleration measurement is crucial for military and industrial applications.
Improving accelerometer performance, especially resolution, is an ongoing research challenge.
Microelectromechanical resonant accelerometers offer potential for high-sensitivity measurements.

Purpose of the Study:

To enhance the resolution of microelectromechanical resonant accelerometers.
To introduce a novel synchronized oscillator-based approach for sensor improvement.
To address limitations in synchronization bandwidth for broader applicability.

Main Methods:

Implemented a unidirectional electrical coupling method to synchronize sensing and reading oscillators.
Achieved synchronized oscillation for enhanced system stability.
Developed a frequency automatic tracking system to broaden synchronization bandwidth.

Main Results:

Achieved a fivefold resolution improvement in the microelectromechanical resonant accelerometer.
Enhanced oscillation system stability to 19.4 ppb.
Increased accelerometer resolution to 1.91 μg.
Expanded synchronization bandwidth from 113 Hz to 1246 Hz, covering ±1 g range.

Conclusions:

The synchronized oscillator enhancement approach offers a significant resolution improvement for resonant sensors.
The novel frequency automatic tracking system overcomes bandwidth limitations of conventional synchronized oscillators.
This method provides a general solution for enhancing microelectromechanical system (MEMS) resonant sensors, applicable to diverse fields.