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Area of Science:

  • Optics and Photonics
  • Micro-electro-mechanical Systems (MEMS)

Background:

  • Lissajous microscanners are vital for compact laser-scanning applications like Light Detection and Ranging (LIDAR) due to high quality factors and low power usage.
  • Current design theory for two-axis micro-electro-mechanical system scanning mirror (MEMS-SM) driven Lissajous scanners inadequately addresses simultaneous temporal and spatial resolution needs.

Purpose of the Study:

  • To enhance the design theory of Lissajous scanners for micro-electro-mechanical systems (MEMS) Light Detection and Ranging (LIDAR).
  • To introduce a general algorithm for calculating the fill factor (FF) as a measure of spatial resolution.
  • To propose three design rules for general Lissajous scanners to optimize performance.

Main Methods:

  • Utilizing the greatest common divisor of two-axis driving frequencies to define temporal resolution.
  • Employing the fill factor (FF) concept to quantify spatial resolution.
  • Developing and applying three general design rules based on Lissajous trajectory characteristics.

Main Results:

  • A general algorithm for calculating the fill factor (FF) was developed.
  • Three novel design rules for Lissajous scanners were proposed and validated.
  • Experimental results confirmed the effectiveness of the proposed design rules in meeting LIDAR requirements.

Conclusions:

  • The proposed design rules successfully enhance Lissajous scanner design theory for MEMS LIDAR applications.
  • The developed methods effectively balance temporal and spatial resolution, crucial for advanced LIDAR systems.